Brief description of the process
In the manufacturing process of semiconductor products, due to the precision of the production equipment and the complexity of the production process, high requirements are put forward for the supporting facilities, especially for the ultrapure water system, which is the blood of the semiconductor industry. There are four parts of the "water quality pre ion bed", "the semi-conductor bed" and "the semi-conductor bed", which can be used to replace the water quality of the "super ion bed", "the semi-conductor bed" and "the semi-conductor bed". According to the requirements of the water quality, some parts of the deionization process can be used to replace the water quality of the "super ion bed", "the semi-conductor bed" and "the semi-conductor bed".
Avoid the large amount of acid and alkali consumed by traditional ion regeneration, which is more environmentally friendly;
The regeneration cycle of traditional ion equipment is relatively long;
Ultrafiltration backwashing drainage, primary ro concentrated water drainage and CEDI concentrated water drainage and their recycling measures are conducive to energy conservation and emission reduction;
Saving water resources and operating costs of semiconductor manufacturing units.
Multi media filter+ Activated carbon filter
Coarse filter + ultrafiltration device
Reverse osmosis part
Reverse osmosis membrane
EDI module and CEDI module
Polishing mixed bed